A viable technique that can produce nanostructures massively and cost-efficiently is essential to realize the promise of nanotechnology. In this talk, a novel nanofabrication technique, as we called it as “dynamic oblique angle deposition”, will be introduced. It has been developed by several groups including us in the past few years to produce three-dimensional (3D) nanostructures of a large variety of materials. This technique combines oblique angle deposition with substrate motions in a physical vapor deposition system to produce 3D nanostructure arrays.
In this talk, I will focus on our current understanding of the growth mechanisms in dynamic oblique angle deposition and present the abnormal growth behaviors in certain metals, calcium fluoride, and titanium nitride. In addition, I will demonstrate unique properties and possible applications of metal and fluoride nanostructures fabricated in our lab.
叶德贤,现为Virginia Commonwealth University(VCU)物理系副教授。他于1992 – 1997 年就读于北京大学地球物理系并获得学士学位。2006年从位于纽约州Troy市的Rensselaer Polytechnic Institute物理系获得物理学博士学位。其PhD导师是著名半导体集成电路Back-end-of-line工艺和材料学家Toh-Ming Lu教授。之后,叶德贤在Lu教授实验室继续博士后研究,期间和多位学者合作,包括Gwo-Ching Wang,Om Nalamasu,Shawn-Yu Lin等。他于2009年前往VCU物理系任教至今。